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Temperature-compensated high-stability silicon resonators
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) (a) Schematic of the DETF resonator actuation and mode shape. The beams of the resonator vibrate in flexural mode. (b) Cross-section scanning electron microscopy of composite beam along section.

Image of FIG. 2.
FIG. 2.

(Color online) Measured and predicted values of the at for beams with different ratios of silicon to silicon dioxide bending stiffness. The theoretical envelope is the standard deviation of the due to the uncertainty in the . Young’s modulus values used to determine are and . A total of 20 devices were measured.

Image of FIG. 3.
FIG. 3.

(Color online) Comparison of the frequency-temperature sensitivities of the composite DETF (measured data), quartz crystal tuning fork (see Ref. 3) and AT-cut quartz crystal cut at and (see Ref. 20). The standard error in measurement of the composite resonator is .

Image of FIG. 4.
FIG. 4.

(Color online) Controlling the turnover temperature is possible by slight modifications of the ratio of the silicon to silicon dioxide bending stiffness. Four devices with different are shown. The standard error in measurement is .


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Scitation: Temperature-compensated high-stability silicon resonators