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General scheme of magnetic actuation.
SQUID measurements of pure Cu and Cu–Ni nanocomposites plated in a bath added with 2 and Ni nanopowders, respectively.
(a) Diagram of magnetic microactuation structure designed for the low-power scheme verification and (b) the top view of as-fabricated SU-8 diaphragm with magnetic Cu–Ni nanocomposite coil.
Vertical displacement of SU-8 diaphragms vs the normalized input to the driving coils, which are made of Cu and Cu–Ni nanocomposite, respectively.
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