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(Color online) Schematic diagram of the YAG-LED and KrF-LED transfer process: (a) CV-LED bonding to host substrate, (b) laser lift-off process, (c) bonding to sapphire substrate, and (d) removal of host substrate and glue layer.
Images of bonded LEDs after laser lift-off with various laser sources and energy densities. (a) is the YAG laser with . (b) is the YAG laser with . (c) is the YAG-laser with . (d) is the KrF laser with . (e) is the high magnification of Fig. 2(d).
(Color online) TEM images of (a) YAG-LED and (b) KrF-LED.
Average leakage currents of LEDs under a reverse bias of .
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