Full text loading...
(Color online) Schematic of the multilayer membrane structure (unit cell).
(a) Membrane cross section showing vertical sidewalls etched through Si using DRIE. (b) Top view of pore array structure. (c) Pore cross section showing thicknesses of film and support layer.
Hydrogen permeation flux as a function of the gas temperature and hydrogen partial pressure.
Long-term hydrogen permeation results showing a enhanced performance upon consecutive membrane annealing cycles.
SEM micrographs of (a) As-deposited, constrained surface, (b) As-deposited, free surface, (c) annealing at , constrained surface, and (d) annealing at , free surface.
Article metrics loading...