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Control of guided resonance in a photonic crystal slab using microelectromechanical actuators
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10.1063/1.2431452
/content/aip/journal/apl/90/3/10.1063/1.2431452
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/3/10.1063/1.2431452
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Cross section diagram of the proposed GR filter design.

Image of FIG. 2.
FIG. 2.

(Color online) Electrical field distributions calculated by RCWA at the gaps of (a) and (b) . A single-crystalline-silicon PC slab has a one-dimensional doubly periodic structure with a period of and widths of , , , and . TE-polarized light at the resonant wavelength of is irradiated to the PC slab. (c) Calculated reflectivity of the proposed GR filter as functions of the incident wavelength and the gap. A single-crystalline-silicon PC slab has a crossed grating with period and square rectangular holes.

Image of FIG. 3.
FIG. 3.

SEM image of the fabricated GR filter. The inset shows the magnified view of the fabricated PC slab.

Image of FIG. 4.
FIG. 4.

(Color online) Reflectivities of the fabricated GR filter as a function of the PC slab displacement (a) around the gap wider than and (b) at the gap from . An incident wavelength is defined as . The inset in (a) shows a measured reflectivity of the fabricated GR filter at the gap wider than as a function of incident wavelength. In (b), laser light at the resonant wavelength of impinges on the PC slab.

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/content/aip/journal/apl/90/3/10.1063/1.2431452
2007-01-18
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Control of guided resonance in a photonic crystal slab using microelectromechanical actuators
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/3/10.1063/1.2431452
10.1063/1.2431452
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