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(Color online) Cross section diagram of the proposed GR filter design.
(Color online) Electrical field distributions calculated by RCWA at the gaps of (a) and (b) . A single-crystalline-silicon PC slab has a one-dimensional doubly periodic structure with a period of and widths of , , , and . TE-polarized light at the resonant wavelength of is irradiated to the PC slab. (c) Calculated reflectivity of the proposed GR filter as functions of the incident wavelength and the gap. A single-crystalline-silicon PC slab has a crossed grating with period and square rectangular holes.
SEM image of the fabricated GR filter. The inset shows the magnified view of the fabricated PC slab.
(Color online) Reflectivities of the fabricated GR filter as a function of the PC slab displacement (a) around the gap wider than and (b) at the gap from . An incident wavelength is defined as . The inset in (a) shows a measured reflectivity of the fabricated GR filter at the gap wider than as a function of incident wavelength. In (b), laser light at the resonant wavelength of impinges on the PC slab.
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