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Large area period grating by multiple nanoimprint lithography and spatial frequency doubling
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10.1063/1.2390652
/content/aip/journal/apl/90/4/10.1063/1.2390652
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/4/10.1063/1.2390652
/content/aip/journal/apl/90/4/10.1063/1.2390652
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/content/aip/journal/apl/90/4/10.1063/1.2390652
2007-01-25
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large area 50nm period grating by multiple nanoimprint lithography and spatial frequency doubling
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/4/10.1063/1.2390652
10.1063/1.2390652
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