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Cross-sectional TEM image of amorphous thin layer by , laser pulses.
Cross-sectional TEM images of amorphous thin layer by (a) , (b) , and (c) femtosecond laser pulses.
Dependence of ablation rate on laser fluence for femtosecond laser of (a) , (b) , and (c) .
Parameters for amorphization and solid state property of Si.
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