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Integrated cantilever sensors with a torsional resonance mode for ultraresoluble on-the-spot bio/chemical detection
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10.1063/1.2433753
/content/aip/journal/apl/90/4/10.1063/1.2433753
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/4/10.1063/1.2433753
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Top-view schematic of the torsion-mode resonant cantilever. The transverse piezoresistor location and the end-paddle branch length are both optimized, with the designed results shown at the top and the left side, respectively.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Fabrication processes of the integrated cantilever. (b) ANSYS simulated torsional vibration mode shape of the cantilever and the generated shear-stress distribution. (c) SEM image of the fabricated cantilever sensor chip.

Image of FIG. 3.
FIG. 3.

(a) For the torsion-mode cantilever, both the open-loop resonant properties (by frequency scanning) and the self-resonance properties (with the aid of an AGC close-loop feedback circuit) are measured. (b) Measured frequency shift of the torsion-mode resonant cantilever that is induced by specific biotin-avidin reaction.

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/content/aip/journal/apl/90/4/10.1063/1.2433753
2007-01-22
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Integrated cantilever sensors with a torsional resonance mode for ultraresoluble on-the-spot bio/chemical detection
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/4/10.1063/1.2433753
10.1063/1.2433753
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