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Top-view schematic of the torsion-mode resonant cantilever. The transverse piezoresistor location and the end-paddle branch length are both optimized, with the designed results shown at the top and the left side, respectively.
(Color online) (a) Fabrication processes of the integrated cantilever. (b) ANSYS simulated torsional vibration mode shape of the cantilever and the generated shear-stress distribution. (c) SEM image of the fabricated cantilever sensor chip.
(a) For the torsion-mode cantilever, both the open-loop resonant properties (by frequency scanning) and the self-resonance properties (with the aid of an AGC close-loop feedback circuit) are measured. (b) Measured frequency shift of the torsion-mode resonant cantilever that is induced by specific biotin-avidin reaction.
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