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Characterization of proton irradiated copolymer thin films for microelectromechanical system applications
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10.1063/1.2435342
/content/aip/journal/apl/90/4/10.1063/1.2435342
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/4/10.1063/1.2435342
/content/aip/journal/apl/90/4/10.1063/1.2435342
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/content/aip/journal/apl/90/4/10.1063/1.2435342
2007-01-25
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of proton irradiated copolymer thin films for microelectromechanical system applications
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/4/10.1063/1.2435342
10.1063/1.2435342
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