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Characterization of proton irradiated copolymer thin films for microelectromechanical system applications
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10.1063/1.2435342
/content/aip/journal/apl/90/4/10.1063/1.2435342
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/4/10.1063/1.2435342

Figures

Image of FIG. 1.
FIG. 1.

Fabrication process of the P(VDF-TrFE) thin film on a membrane structure and top view of the electrode pattern.

Image of FIG. 2.
FIG. 2.

(Color online) Longitudinal strain as a function of the square of applied electric field for various proton doses. Effective electrostrictive coefficient of P(VDF-TrFE) (a) on Si and (b) at the center of the membrane with Si back etched can be evaluated by Eq. (4) .

Image of FIG. 3.
FIG. 3.

Displacement vs measuring frequency at the center of a membrane spin coated with P(VDF-TrFE) film irradiated with . (Frequency measured at the second harmonic of driving frequency.)

Image of FIG. 4.
FIG. 4.

Displacement across the membrane spin coated with P(VDF-TrFE) film irradiated with proton dose under . Maximum displacement at the center of the membrane is observed in both measurements off-resonance (see inset) and at resonance. The solid line is drawn to guide the eye. Inset: Enlarged view of the off-resonance profile.

Tables

Generic image for table
Table I.

Comparison of the electrostrictive coefficients of proton irradiated P(VDF-TrFE) at .

Generic image for table
Table II.

Material properties of the thin films in the P(VDF-TrFE) membrane.

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/content/aip/journal/apl/90/4/10.1063/1.2435342
2007-01-25
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of proton irradiated copolymer thin films for microelectromechanical system applications
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/4/10.1063/1.2435342
10.1063/1.2435342
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