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Fabrication process of the P(VDF-TrFE) thin film on a membrane structure and top view of the electrode pattern.
(Color online) Longitudinal strain as a function of the square of applied electric field for various proton doses. Effective electrostrictive coefficient of P(VDF-TrFE) (a) on Si and (b) at the center of the membrane with Si back etched can be evaluated by Eq. (4) .
Displacement vs measuring frequency at the center of a membrane spin coated with P(VDF-TrFE) film irradiated with . (Frequency measured at the second harmonic of driving frequency.)
Displacement across the membrane spin coated with P(VDF-TrFE) film irradiated with proton dose under . Maximum displacement at the center of the membrane is observed in both measurements off-resonance (see inset) and at resonance. The solid line is drawn to guide the eye. Inset: Enlarged view of the off-resonance profile.
Comparison of the electrostrictive coefficients of proton irradiated P(VDF-TrFE) at .
Material properties of the thin films in the P(VDF-TrFE) membrane.
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