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Impact of Ni-silicide grain orientation on the strain and stress fields induced in patterned silicon
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10.1063/1.2437064
/content/aip/journal/apl/90/5/10.1063/1.2437064
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/5/10.1063/1.2437064
/content/aip/journal/apl/90/5/10.1063/1.2437064
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/content/aip/journal/apl/90/5/10.1063/1.2437064
2007-01-30
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of Ni-silicide grain orientation on the strain and stress fields induced in patterned silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/5/10.1063/1.2437064
10.1063/1.2437064
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