1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Measured limits of detection based on thermal-mechanical frequency noise in micromechanical sensors
Rent:
Rent this article for
USD
10.1063/1.2450643
/content/aip/journal/apl/90/5/10.1063/1.2450643
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/5/10.1063/1.2450643
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Optical setup for interrogation and readout of an all-optical micromechanical sensor. BS, beam splitter: HP, high pass; PD, photodetector; WDM, wavelength division multiplexer. The false-color scanning electron micrograph shows a typical long microbeam.

Image of FIG. 2.
FIG. 2.

(Color online) Left: Spectra obtained by driving a gold microbeam resonator at the fundamental flexural mode. The bottom spectra are comparison of the calculated and measured noise floor (with the driving laser off). Right: The measured resonant frequency vs time. The strength of driving is indicated by the modulated optical power of the driving laser.

Image of FIG. 3.
FIG. 3.

(Color online) Comparison of the measured and calculated Allan variances (frequency noise) based on Eq. (3) for various driving strengths.

Loading

Article metrics loading...

/content/aip/journal/apl/90/5/10.1063/1.2450643
2007-02-02
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measured limits of detection based on thermal-mechanical frequency noise in micromechanical sensors
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/5/10.1063/1.2450643
10.1063/1.2450643
SEARCH_EXPAND_ITEM