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Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
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10.1063/1.2642619
/content/aip/journal/apl/90/9/10.1063/1.2642619
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/9/10.1063/1.2642619
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Figures

Image of FIG. 1.
FIG. 1.

(a) SEM image of a typical thick, long, freestanding ZnO microbridge on Si(111) platform. About air gap was created when the patterned was subjecting to etching of silicon. (b) SEM image of a typical thick, long, freestanding ZnO cantilever on Si(111) platform.

Image of FIG. 2.
FIG. 2.

(Color online) Raman spectra recorded from several locations along a freestanding ZnO microbridge. The inset shows the probing locations.

Image of FIG. 3.
FIG. 3.

(Color online) Raman spectra recorded from several locations along a freestanding ZnO cantilever. The inset shows the probing locations.

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/content/aip/journal/apl/90/9/10.1063/1.2642619
2007-02-28
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/9/10.1063/1.2642619
10.1063/1.2642619
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