1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators
Rent:
Rent this article for
USD
10.1063/1.2709620
/content/aip/journal/apl/90/9/10.1063/1.2709620
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/9/10.1063/1.2709620

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Scanning electron micrograph of one of the devices used in the experiments (oblique view). The insets show top-view closeup images of the detection (left) and drive (right) metal loops. (b) Schematic of the experimental setup: DC denotes directional coupler, FD frequency doubler, and HPF high-pass filter.

Image of FIG. 2.
FIG. 2.

(Color online) Raw signal, referred to the preamplifier input, from a -long beam. The root-mean-square amplitudes of the drive and bias voltages are 22 and , respectively. The inset shows both quadratures of the resonant response of the tenth out-of-plane mode (not shown in main panel) and the almost indistinguishable Lorentzian fit to the data.

Image of FIG. 3.
FIG. 3.

(Color online) Efficiency of electrothermal drive and piezoresistive detection, normalized to that of the fundamental mode, for the first 12 out-of-plane modes of the -long beam. The stars show experimental data, while the connected symbols show the results of finite-element simulations excluding (circles) and including (squares) the effect of thermal rolloff. The inset shows the predicted shape of the 11th out-of-plane mode.

Tables

Generic image for table
Table I.

Predicted, , and experimental, , resonance frequencies, as well as quality factors in vacuum, , for the lowest twelve out-of-plane (out) modes and lowest five in-plane (in) modes of a -long beam. In simulations, we assume the following material properties for the SiC layer: Young’s modulus of , Poisson ratio of 0.3, mass density of , (Ref. 17), and intrinsic tensile strain of . The strain value was varied to obtain the best fit to the experimental frequencies.

Loading

Article metrics loading...

/content/aip/journal/apl/90/9/10.1063/1.2709620
2007-02-28
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/9/10.1063/1.2709620
10.1063/1.2709620
SEARCH_EXPAND_ITEM