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(a) OES spectra of a plasmas with the concentration ranging from 15% to 75% (the spectra are normalized with respect to CN emission at ). The insert shows the OES spectrum of a plasma. (b) The and intensity ratios vs the nitrogen concentration in plasma.
Variation of atomic concentration ratio in nitrogen-incorporated ND films (estimated from XPS measurements) as a function of concentration in plasma.
Deconvoluted XPS core level spectra of nitrogen-incorporated ND films deposited with different percentages of in plasmas.
Calculated phase ratio of carbon bonds as a function of nitrogen concentration in plasma.
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