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Photoemission spectroscopic study of nitrogen-incorporated nanocrystalline diamond films
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10.1063/1.2709953
/content/aip/journal/apl/90/9/10.1063/1.2709953
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/9/10.1063/1.2709953
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) OES spectra of a plasmas with the concentration ranging from 15% to 75% (the spectra are normalized with respect to CN emission at ). The insert shows the OES spectrum of a plasma. (b) The and intensity ratios vs the nitrogen concentration in plasma.

Image of FIG. 2.
FIG. 2.

Variation of atomic concentration ratio in nitrogen-incorporated ND films (estimated from XPS measurements) as a function of concentration in plasma.

Image of FIG. 3.
FIG. 3.

Deconvoluted XPS core level spectra of nitrogen-incorporated ND films deposited with different percentages of in plasmas.

Image of FIG. 4.
FIG. 4.

Calculated phase ratio of carbon bonds as a function of nitrogen concentration in plasma.

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/content/aip/journal/apl/90/9/10.1063/1.2709953
2007-02-27
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Photoemission spectroscopic study of nitrogen-incorporated nanocrystalline diamond films
http://aip.metastore.ingenta.com/content/aip/journal/apl/90/9/10.1063/1.2709953
10.1063/1.2709953
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