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(Color online) Experimental XRD reciprocal space map around the (115) diffraction peak of samples grown at (a) , ; (b) , , , , and , .
(Color online) Plot of experimental perpendicular mismatch, parallel mismatch, and relaxed mismatch of under (a) different growth temperatures and (b) different plasma powers conditions.
(Color online) Plot of calculated lattice mismatch vs N content for different N point defects. The four experimental data points were measured using XRD (for lattice mismatch) and SIMS (for N content).
Calculated N defect content (percentage of N point defects over the total concentration of In and Sb atoms) in samples grown at different conditions.
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