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(Color online) (a) Photograph of the cantilever-based mass sensor monolithically integrated with full-custom designed electronics in AMS’s CMOS process(Ref. 13). (b) Scanning electron microscopy image of a fabricated long and width metal cantilever resonator with a three-electrode configuration.
(Color online) Plot of the resonance frequency shifts induced by sequential depositions of layers of 20 and thick, respectively. The density of is . The equivalent accreted mass for a cantilever is indicated in the top axis.
(Color online) Real time attogram-scale mass sensing experiment with a monolithic mass sensor. The device is biased with and excited with . (a) Zero-span plot of the parameter phase showing the changes induced by successive expositions to a gold atom flux (deposited equivalent mass per area is already indicated). parameter frequency response, magnitude (b), and phase (c), before any deposition and after successive depositions .
(Color online) Frequency response obtained in air, atmospheric pressure, and room temperature, with and . The resonance frequency is around and an electrical quality factor of around 100 is measured. The inset shows the fluctuation of the phase signal measured in a bandwidth.
Calculated and experimental values of mass sensitivity and mass resolution for distributed and locally mass deposition for a cantilever. Experimental measurements have been performed in air, atmospheric pressure, and room temperature. A quality factor of 100 and root-mean-square oscillation amplitude of , consistent with a linear response, have been used for intrinsic mass resolution determination.
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