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Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions
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Image of FIG. 1.
FIG. 1.

(Color online) (a) Photograph of the cantilever-based mass sensor monolithically integrated with full-custom designed electronics in AMS’s CMOS process(Ref. 13). (b) Scanning electron microscopy image of a fabricated long and width metal cantilever resonator with a three-electrode configuration.

Image of FIG. 2.
FIG. 2.

(Color online) Plot of the resonance frequency shifts induced by sequential depositions of layers of 20 and thick, respectively. The density of is . The equivalent accreted mass for a cantilever is indicated in the top axis.

Image of FIG. 3.
FIG. 3.

(Color online) Real time attogram-scale mass sensing experiment with a monolithic mass sensor. The device is biased with and excited with . (a) Zero-span plot of the parameter phase showing the changes induced by successive expositions to a gold atom flux (deposited equivalent mass per area is already indicated). parameter frequency response, magnitude (b), and phase (c), before any deposition and after successive depositions .

Image of FIG. 4.
FIG. 4.

(Color online) Frequency response obtained in air, atmospheric pressure, and room temperature, with and . The resonance frequency is around and an electrical quality factor of around 100 is measured. The inset shows the fluctuation of the phase signal measured in a bandwidth.


Generic image for table
Table I.

Calculated and experimental values of mass sensitivity and mass resolution for distributed and locally mass deposition for a cantilever. Experimental measurements have been performed in air, atmospheric pressure, and room temperature. A quality factor of 100 and root-mean-square oscillation amplitude of , consistent with a linear response, have been used for intrinsic mass resolution determination.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions