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Nitride-based light emitting diodes with indium tin oxide electrode patterned by imprint lithography
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10.1063/1.2753726
/content/aip/journal/apl/91/1/10.1063/1.2753726
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/1/10.1063/1.2753726
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Detailed proceeding steps for the imprint lithography.

Image of FIG. 2.
FIG. 2.

(a) SEM micrograph and (b) AFM image of the patterned LED with hole diameter and spacing. The inset shown in the upper right corner of (a) shows an enlarged SEM micrograph.

Image of FIG. 3.
FIG. 3.

EL spectra of the fabricated LEDs.

Image of FIG. 4.
FIG. 4.

Measured characteristics of the fabricated LEDs.

Image of FIG. 5.
FIG. 5.

Schematic drawings of (a) conventional ITO LED and (b) LED with imprinted ITO electrode.

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/content/aip/journal/apl/91/1/10.1063/1.2753726
2007-07-03
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nitride-based light emitting diodes with indium tin oxide electrode patterned by imprint lithography
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/1/10.1063/1.2753726
10.1063/1.2753726
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