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Detailed proceeding steps for the imprint lithography.
(a) SEM micrograph and (b) AFM image of the patterned LED with hole diameter and spacing. The inset shown in the upper right corner of (a) shows an enlarged SEM micrograph.
EL spectra of the fabricated LEDs.
Measured characteristics of the fabricated LEDs.
Schematic drawings of (a) conventional ITO LED and (b) LED with imprinted ITO electrode.
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