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Fabrication of low loss (AMTIR-1) planar waveguides
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10.1063/1.2754360
/content/aip/journal/apl/91/1/10.1063/1.2754360
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/1/10.1063/1.2754360
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Cross-sectional SEM micrographs of AMTIR-1 film etched in plasma (a) and finished rib-type waveguide (b). The scale bars in each image denote .

Image of FIG. 2.
FIG. 2.

Raw cutback insertion loss data with linear regression fit lines for the each width waveguide. All data points have the error range of , which is the nominal error in repeated measurement. The slopes of three lines also have uncertainty of .

Image of FIG. 3.
FIG. 3.

Dark field optical microscope image of wide waveguide. Two parallel lines indicate the edges of the waveguide and the white dots are particulate contaminants in the film.

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/content/aip/journal/apl/91/1/10.1063/1.2754360
2007-07-05
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of low loss Ge33As12Se55 (AMTIR-1) planar waveguides
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/1/10.1063/1.2754360
10.1063/1.2754360
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