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X-ray microbeam probing of elastic strains in patterned implanted single-crystal
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10.1063/1.2776859
/content/aip/journal/apl/91/11/10.1063/1.2776859
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/11/10.1063/1.2776859
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

X-ray diffraction line scan of the (3,0,12) Bragg peak across three implanted channels (channel widths are, from left to right, 150, 80, and ), superimposed on a Nomarski micrograph of the channels.

Image of FIG. 2.
FIG. 2.

X-ray diffraction measurements: (a) Implanted region and (b) after annealing to for . The unimplanted-region (“bulk”) signal comes dominantly from the volume below the implanted region. A separate measurement outside of the implanted surface area showed an essentially identical bulk line shape.

Image of FIG. 3.
FIG. 3.

(Color online) Energy-resolved x-ray intensity map of the crystal surface surrounding a single implanted channel, dashed lines. The unstrained substrate lattice is the vertical line (red) independent of position. Inset: Schematic of the multizone elastic model.

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/content/aip/journal/apl/91/11/10.1063/1.2776859
2007-09-13
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: X-ray microbeam probing of elastic strains in patterned He+ implanted single-crystal LiNbO3
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/11/10.1063/1.2776859
10.1063/1.2776859
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