1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Patterning of silicon by indentation and chemical etching
Rent:
Rent this article for
USD
10.1063/1.2779111
/content/aip/journal/apl/91/12/10.1063/1.2779111
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/12/10.1063/1.2779111
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) AFM image of arrays of HPP on Si (100) surface before etching. (b) AFM image of arrays of HPP on Si (100) surface after etching. (c) Section profile of HPP indents before and after etching.

Image of FIG. 2.
FIG. 2.

(a) Raman spectra of indents before and after etching. (b) Raman spectra of indents before and after annealing.

Image of FIG. 3.
FIG. 3.

XTEM images of HPP on Si (100) surface before (shown as an inset) and after etching.

Image of FIG. 4.
FIG. 4.

(Color online) (a) AFM image of arrays of HPP on Si (100) surface after etching. (b) Section profile of ten HPP indents after etching.

Loading

Article metrics loading...

/content/aip/journal/apl/91/12/10.1063/1.2779111
2007-09-20
2014-04-25
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Patterning of silicon by indentation and chemical etching
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/12/10.1063/1.2779111
10.1063/1.2779111
SEARCH_EXPAND_ITEM