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Nanoscale ablation on patterned diamondlike carbon film with femtosecond laser pulses
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10.1063/1.2784966
/content/aip/journal/apl/91/12/10.1063/1.2784966
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/12/10.1063/1.2784966
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) SEM images of (a) the patterned Si substrate, (b) an array of stripes in the central area, (c) the DLC-coated stripes at period, and (d) SPM image of the same stripes as in (c).

Image of FIG. 2.
FIG. 2.

(Color online) SPM images of the period DLC stripes irradiated with (a) , (b) , (c) , (d) , and (e) at . The arrow denotes the polarization direction.

Image of FIG. 3.
FIG. 3.

Mean spacing in the periodic nanostructure formed on the stripe surface (solid circles) and on the nonpatterned surface (open circles) as a function of at . The laser -field is perpendicular to the stripe on its surface.

Image of FIG. 4.
FIG. 4.

SEM images of the DLC surfaces including the period stripes (a) perpendicular and (b) parallel to the -field, as indicated by an arrow, with at .

Image of FIG. 5.
FIG. 5.

Mean spacing in the periodic nanostructure formed on the stripe surface (solid circles) and nonpatterned surface (open circles) as a function of with . The laser -field is perpendicular to the stripe on its surface.

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/content/aip/journal/apl/91/12/10.1063/1.2784966
2007-09-17
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanoscale ablation on patterned diamondlike carbon film with femtosecond laser pulses
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/12/10.1063/1.2784966
10.1063/1.2784966
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