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Intrusion-type deformation in epitaxial nanolaminates
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Image of FIG. 1.
FIG. 1.

XTEM images from an as-deposited nanolaminate showing layers of and in (a) overview and (b) high resolution.

Image of FIG. 2.
FIG. 2.

(a) XSTEM image from the nanolaminate after nanoindentation to a maximum load of . The area is shown in a higher magnification in Fig. 3(a). (b) Loading-unloading curve for the same film showing pop-in discontinuities. The inset shows an AFM image of the indented zone.

Image of FIG. 3.
FIG. 3.

Electron microscopy results from the nanomlaminate after nanoindentation. (a) XSTEM image (region ) with marked regions of diffuse, bent, cut, and delaminated layers, (b) zero-loss image of the region with diffuse layers in (a) exhibiting interfacial steps, feathering, and persistent slip lines along in the layers (indicated by white lines), (c) higher-magnification view from (b) showing feathering from the intrusion of nanolaminated into itself and the TiC layers, and (d) high-resolution image of two typical layers in (a) showing two domains in the separated by an 18° deformation-induced dislocation wall boundary as well as individual edge dislocations on the inclined (111) planes (marked by T symbols).


Generic image for table
Table I.

Hardness and reduced Young’s modulus from nanoindentation experiments with a maximum load of of nanolaminate films with different periods . Values for monolithic (Ref. 7) and (reference sample, this work) thin films are also shown.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Intrusion-type deformation in epitaxial Ti3SiC2∕TiC0.67 nanolaminates