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Micromechanical resonators fabricated from lattice-matched and etch-selective heterostructures
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10.1063/1.2790482
/content/aip/journal/apl/91/13/10.1063/1.2790482
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/13/10.1063/1.2790482
/content/aip/journal/apl/91/13/10.1063/1.2790482
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/content/aip/journal/apl/91/13/10.1063/1.2790482
2007-09-26
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Micromechanical resonators fabricated from lattice-matched and etch-selective GaAs∕InGaP∕GaAs heterostructures
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/13/10.1063/1.2790482
10.1063/1.2790482
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