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Cu films containing insoluble Ru and on barrierless Si for excellent property improvements
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10.1063/1.2790843
/content/aip/journal/apl/91/13/10.1063/1.2790843
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/13/10.1063/1.2790843
/content/aip/journal/apl/91/13/10.1063/1.2790843
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/content/aip/journal/apl/91/13/10.1063/1.2790843
2007-09-27
2014-09-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Cu films containing insoluble Ru and RuNX on barrierless Si for excellent property improvements
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/13/10.1063/1.2790843
10.1063/1.2790843
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