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(Color online) (a) An array of Si microdisk cavities with a radius of . (b) Finite element simulation of the normalized electric-field intensity for the TM cavity mode studied in Fig. 3.
(Color online) Summary of best linewidths after selected processing steps for radii disks fabricated with (a) a stoichiometric encapsulation layer and (b) a thermal oxide encapsulation layer along with various annealing trials.
(Color online) Summary of best linewidths after selected processing steps for radii disks fabricated without an initial protective cap. Inset: transmission spectrum of a TM-like WGM doublet resonance (Ref. 8) of a radius disk after the final high-temperature anneal.
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