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Rapid directed self assembly of lamellar microdomains from a block copolymer containing hybrid
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10.1063/1.2791003
/content/aip/journal/apl/91/14/10.1063/1.2791003
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/14/10.1063/1.2791003
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Figures

Image of FIG. 1.
FIG. 1.

SEM of hybrid system. (a)–(d) are cross sections of films. (a) As-cast film, (b) after baking at for , (c) after baking at for , and (d) after baking at for . (e)–(h) are plane-view SEM micrographs. (e) lamellar system, (f) lamellar system, (g) low magnification micrograph of lamellar system, and (h) low magnification micrograph of lamellar system.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Schematic of the directed self-assembly. Prepatterned substrates with a neutral bottom surface and selectively wettable sidewalls are used for DSA of a hybrid system. (b) Lamellae of in the funnel shaped trenches. (c) in trenches of various widths.

Image of FIG. 3.
FIG. 3.

Scanning electron micrographs of directed self-assembly of the system in a trench with width of and length of (a) 0.5, (b) 1, (c) 1.5, and (d) .

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/content/aip/journal/apl/91/14/10.1063/1.2791003
2007-10-01
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Rapid directed self assembly of lamellar microdomains from a block copolymer containing hybrid
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/14/10.1063/1.2791003
10.1063/1.2791003
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