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Barrier performance of ultrathin Ni–Ti film for integrating ferroelectric capacitors on Si
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10.1063/1.2794734
/content/aip/journal/apl/91/14/10.1063/1.2794734
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/14/10.1063/1.2794734
/content/aip/journal/apl/91/14/10.1063/1.2794734
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/content/aip/journal/apl/91/14/10.1063/1.2794734
2007-10-04
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Barrier performance of ultrathin Ni–Ti film for integrating ferroelectric capacitors on Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/14/10.1063/1.2794734
10.1063/1.2794734
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