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Laser-induced fluorescence measurements in an inductively coupled plasma reactor
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10.1063/1.2801393
/content/aip/journal/apl/91/16/10.1063/1.2801393
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/16/10.1063/1.2801393
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Chamber diagram showing vertical and radial laser sheets and the CCD camera’s field of view.

Image of FIG. 2.
FIG. 2.

(Color online) (a) at a point in the bulk plasma. The solid curve is a fit to a nondrifting Gaussian. (b) at a point in the presheath. The solid curve is a fit to a Gaussian drifting downward at .

Image of FIG. 3.
FIG. 3.

(Color online) Vertical ion drift velocities in the presheath.

Image of FIG. 4.
FIG. 4.

(Color online) Electric potential in presheath, solid curve is fit to theory.

Image of FIG. 5.
FIG. 5.

Vector map of ion drift velocities. The wafer is just above the electrostatic chuck, shown in gray. Vectors are shown every ten grid points and should be compared to the reference vector inside the chuck with length of .

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/content/aip/journal/apl/91/16/10.1063/1.2801393
2007-10-19
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser-induced fluorescence measurements in an inductively coupled plasma reactor
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/16/10.1063/1.2801393
10.1063/1.2801393
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