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Chamber diagram showing vertical and radial laser sheets and the CCD camera’s field of view.
(Color online) (a) at a point in the bulk plasma. The solid curve is a fit to a nondrifting Gaussian. (b) at a point in the presheath. The solid curve is a fit to a Gaussian drifting downward at .
(Color online) Vertical ion drift velocities in the presheath.
(Color online) Electric potential in presheath, solid curve is fit to theory.
Vector map of ion drift velocities. The wafer is just above the electrostatic chuck, shown in gray. Vectors are shown every ten grid points and should be compared to the reference vector inside the chuck with length of .
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