banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Dispersion control in two-dimensional superlattice photonic crystal slab waveguides by atomic layer deposition
Rent this article for
View: Figures


Image of FIG. 1.
FIG. 1.

Top-view SEM images of a triangular-based SL-PC Si slab WG ALD coated with thicknesses of (a) 0, (b) 30, (c) 60, (d) 90, and (e) . A cleaved cross section of the coated waveguide is shown in (f) and reveals complete infiltration of the larger air holes with a solid plug.

Image of FIG. 2.
FIG. 2.

(Color online) (a) 2D SL-PC geometrical model. (b) Dependence of ratio on the thickness normalized to the lattice constant for conformal coatings of and Si in a 2D SL-PC with strength of 0.584. The effective dielectric weight for holes , , and , , is also plotted. The initial normalized radii of hole and are and , respectively. The dashed vertical line indicates when the smaller holes are fully filled.

Image of FIG. 3.
FIG. 3.

(Color online) Measured (dots) and calculated (lines) photonic bands for an uncoated (left), coated (center), and coated (right) slab waveguides along the direction. The gray region corresponds to guided modes that could not be measured.

Image of FIG. 4.
FIG. 4.

(Color online) (a) Isolated plot of measured (dots) and calculated (dashed lines) TM-polarized bands 6 and 9 extracted from Fig. 3. (b) Experimentally determined frequency of bands 6 (circle) and 9 (square) from (a) along the direction as a function of thickness. The schematics show the unit cell of each structure. (c) Dependence of the gradient (group velocity) on thickness for band 6 at a normalized wave-vector value of 0.11. A zero group velocity is obtained for a coating.


Article metrics loading...


Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dispersion control in two-dimensional superlattice photonic crystal slab waveguides by atomic layer deposition