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Top-view SEM images of a triangular-based SL-PC Si slab WG ALD coated with thicknesses of (a) 0, (b) 30, (c) 60, (d) 90, and (e) . A cleaved cross section of the coated waveguide is shown in (f) and reveals complete infiltration of the larger air holes with a solid plug.
(Color online) (a) 2D SL-PC geometrical model. (b) Dependence of ratio on the thickness normalized to the lattice constant for conformal coatings of and Si in a 2D SL-PC with strength of 0.584. The effective dielectric weight for holes , , and , , is also plotted. The initial normalized radii of hole and are and , respectively. The dashed vertical line indicates when the smaller holes are fully filled.
(Color online) Measured (dots) and calculated (lines) photonic bands for an uncoated (left), coated (center), and coated (right) slab waveguides along the direction. The gray region corresponds to guided modes that could not be measured.
(Color online) (a) Isolated plot of measured (dots) and calculated (dashed lines) TM-polarized bands 6 and 9 extracted from Fig. 3. (b) Experimentally determined frequency of bands 6 (circle) and 9 (square) from (a) along the direction as a function of thickness. The schematics show the unit cell of each structure. (c) Dependence of the gradient (group velocity) on thickness for band 6 at a normalized wave-vector value of 0.11. A zero group velocity is obtained for a coating.
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