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In-plane excitation of thin silicon cantilevers using piezoelectric thin films
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10.1063/1.2805070
/content/aip/journal/apl/91/18/10.1063/1.2805070
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/18/10.1063/1.2805070

Figures

Image of FIG. 1.
FIG. 1.

SEM image of cantilever specimen.

Image of FIG. 2.
FIG. 2.

Schematic cross section of cantilever.

Image of FIG. 3.
FIG. 3.

(Color online) Frequency response of cantilever specimen. (Inset images show mode shapes of the first, second, and fourth modes, and the out-of-plane displacement of the third mode).

Image of FIG. 4.
FIG. 4.

Frequency response of in-plane mode with description of determination.

Tables

Generic image for table
Table I.

Comparison of measured and theoretical resonant response amplitudes.

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/content/aip/journal/apl/91/18/10.1063/1.2805070
2007-10-31
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: In-plane excitation of thin silicon cantilevers using piezoelectric thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/18/10.1063/1.2805070
10.1063/1.2805070
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