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Undulation of sub- porous dielectric structures: A mechanical analysis
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10.1063/1.2805774
/content/aip/journal/apl/91/19/10.1063/1.2805774
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/19/10.1063/1.2805774
/content/aip/journal/apl/91/19/10.1063/1.2805774
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/content/aip/journal/apl/91/19/10.1063/1.2805774
2007-11-06
2014-10-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Undulation of sub-100nm porous dielectric structures: A mechanical analysis
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/19/10.1063/1.2805774
10.1063/1.2805774
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