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Time dependent plasma properties during microarcing in radio frequency plasmas
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10.1063/1.2806186
/content/aip/journal/apl/91/19/10.1063/1.2806186
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/19/10.1063/1.2806186
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

A schematic diagram of the rf plasma system and ion energy analyzer used in the microarcing study.

Image of FIG. 2.
FIG. 2.

A typical trace showing the floating potential during a microarc. The inset in the figure shows a series of microarcs recorded in the experiment.

Image of FIG. 3.
FIG. 3.

The time averaged ion current as a function of discriminator bias for different rf powers on the dc grounded electrode.

Image of FIG. 4.
FIG. 4.

The ion current as a function of discriminator bias ( curve) at different times referenced to microarc initiation.

Image of FIG. 5.
FIG. 5.

The ion/plasma density and cutoff bias as a function of time since microarc initiation.

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/content/aip/journal/apl/91/19/10.1063/1.2806186
2007-11-06
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Time dependent plasma properties during microarcing in radio frequency plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/19/10.1063/1.2806186
10.1063/1.2806186
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