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A schematic diagram of the rf plasma system and ion energy analyzer used in the microarcing study.
A typical trace showing the floating potential during a microarc. The inset in the figure shows a series of microarcs recorded in the experiment.
The time averaged ion current as a function of discriminator bias for different rf powers on the dc grounded electrode.
The ion current as a function of discriminator bias ( curve) at different times referenced to microarc initiation.
The ion/plasma density and cutoff bias as a function of time since microarc initiation.
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