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Time dependent plasma properties during microarcing in radio frequency plasmas
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10.1063/1.2806186
/content/aip/journal/apl/91/19/10.1063/1.2806186
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/19/10.1063/1.2806186
/content/aip/journal/apl/91/19/10.1063/1.2806186
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/content/aip/journal/apl/91/19/10.1063/1.2806186
2007-11-06
2014-12-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Time dependent plasma properties during microarcing in radio frequency plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/19/10.1063/1.2806186
10.1063/1.2806186
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