1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
GaAs metal-oxide-semiconductor capacitors using atomic layer deposition of gate dielectric: Fabrication and characterization
Rent:
Rent this article for
USD
10.1063/1.2806190
/content/aip/journal/apl/91/19/10.1063/1.2806190
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/19/10.1063/1.2806190
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

XPS Ga and As spectra of the interface for (a) nontreated and (b) sulfide-treated samples.

Image of FIG. 2.
FIG. 2.

(a) Cross-sectional HRTEM micrograph of the gate stack after PDA at for . (b) HAADF image of the same region, overlaid on the corresponding EELS line scan. (c) A very thin interfacial of was observed at the interface.

Image of FIG. 3.
FIG. 3.

Frequency dispersion behavior of MOS capacitors on the nontreated and sulfur-passivated -type GaAs substrates. The inset also demonstrates the curve for the same sulfide-treated capacitor with thick .

Image of FIG. 4.
FIG. 4.

(a) CET as a function of physical thickness. CET of was obtained for the device with thick . The inset of (a) shows the bidirectional sweep of the sulfide-treated sample with thick . (b) Calculated and measured using the Terman and ac-conductance methods. The inset shows the frequency dispersion behavior of a capacitor on a sulfide-treated -type GaAs substrate.

Loading

Article metrics loading...

/content/aip/journal/apl/91/19/10.1063/1.2806190
2007-11-05
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: GaAs metal-oxide-semiconductor capacitors using atomic layer deposition of HfO2 gate dielectric: Fabrication and characterization
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/19/10.1063/1.2806190
10.1063/1.2806190
SEARCH_EXPAND_ITEM