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(Color online) Process flow of fabricating silicon photonic wires: (a) deep silicon etching, (b) oxide mask removal, (c) hydrogen annealing, and (d) thermal oxidation.
Scanning electron micrographs of the fabricated silicon photonic wire.
(Color online) Schematic illustration of an integrated silicon wire as well as a 3D taper.
Scanning electron micrographs on the cross section of the coupler at different positions.
(Color online) Simulation on (a) 3D tapered coupler and the mode profiles at different positions, and (b) power distribution along the propagation in the 3D taper.
(Color online) Measured insertion losses vs the silicon-wire lengths.
(Color online) Measured coupler losses vs the 3D taper lengths.
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