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(Color online) (a) RHEED intensity oscillation during the film growth of the superlattice. (b) Topographic AFM image of the superlattice film of . Atomically flat terraced and stepped structures are seen.
(Color online) (a) Out-of-plane XRD patterns of superlattices (, 2, 4, 8, and 16). Intense Bragg peak of the superlattices are seen together with the , and satellites. The period of the superlattices corresponds well with that desired (inset). (b) HAADF-STEM image and edge EELS profile. The image intensity at the Ti column in a one unit cell thickness of shows higher intensity than that of the barrier layer, and the edge EELS from the Nb-doped layer shows a broad profile in the arrowed region, confirming that the doped ions and electrons are exclusively confined in the layer.
(Color online) (a) plots for the superlattices. A dramatic increase of is seen with decreasing . Plots of are shown in the inset. (b) plots for (, 2, and 4) superlattices. Saturation of the value is seen when in all cases.
Observed and values of the superlattices at room temperature. The values of the layer in are estimated as .
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