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Pneumatically actuated elastomeric device for nanoscale surface patterning
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10.1063/1.2755930
/content/aip/journal/apl/91/2/10.1063/1.2755930
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/2/10.1063/1.2755930
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of a pneumatically actuated PDMS surface-patterning device with a silicon nitride tip on a PDMS membrane.

Image of FIG. 2.
FIG. 2.

(a) Pneumatically actuated PDMS device fabrication process: (1) cavity etching on silicon wafer; (2) ZnO and silicon nitride layers deposition and patterning; (3) spin coating the thin PDMS layer; (4) PDMS bonding with the pneumatic actuation PDMS layer; (5) PDMS device releasing.

Image of FIG. 3.
FIG. 3.

Optical micrograph of a circular PDMS membrane with a silicon nitride tip. The inset is a close-up view of the silicon nitride tip.

Image of FIG. 4.
FIG. 4.

(a) Lateral force microscopy (LFM) images of ODT dot array made by the pneumatically activated silicon nitride tip on the PDMS membrane at contacting times of 2 and . The temperature and the relative humidity are and 38%, respectively. (b) Characterization of the pneumatically actuated PDMS device with the nitride tip on the PDMS membrane at different contacting times.

Image of FIG. 5.
FIG. 5.

LFM image of a three-line pattern made by the pneumatically actuated PDMS device with the silicon nitride tip using the dot matrix printing format at contact time of , , and 40% relative humidity (scanning area is 6 by ).

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/content/aip/journal/apl/91/2/10.1063/1.2755930
2007-07-10
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Pneumatically actuated elastomeric device for nanoscale surface patterning
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/2/10.1063/1.2755930
10.1063/1.2755930
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