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Cross-sectional SEM micrograph showing the -cBN/ND multilayer grown on a thick ND buffer layer. (b) Enlarged view of the multilayer region.
FTIR spectra of (a) -cBN/ND multilayer and (b) -cBN monolithic layer. The corresponding Newton ring patterns are shown in the insets.
Hardness vs displacement curves measured by nanoindentation on ND buffer layer, -cBN monolithic layer, and -cBN/ND multilayer in the plain-view direction.
Dependence of hardness and elastic modulus on displacement measured on a nine-layered -cBN/ND multilayer.
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