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Electron temperature measurements in plasmas with surface wave absorption and wave cutoff frequency
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10.1063/1.2812567
/content/aip/journal/apl/91/20/10.1063/1.2812567
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/20/10.1063/1.2812567
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematics of the experimental setup. (b) Structure of the CAP and the cross section of the radiating antenna.

Image of FIG. 2.
FIG. 2.

(Color online) Frequency spectra of reflected and transmitted waves at rf and for different radiating antenna lengths.

Image of FIG. 3.
FIG. 3.

(Color online) Electron temperature measured using the CAP and SLP as a function of the rf power at Ar .

Image of FIG. 4.
FIG. 4.

(Color online) Dependence of electron temperature and electron density on the Ar pressure at rf .

Image of FIG. 5.
FIG. 5.

(Color online) Spatial distribution of the electron temperature at Ar and rf .

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/content/aip/journal/apl/91/20/10.1063/1.2812567
2007-11-13
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron temperature measurements in plasmas with surface wave absorption and wave cutoff frequency
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/20/10.1063/1.2812567
10.1063/1.2812567
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