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(a) A SEM image of a suspended L7 cavity with and . (b) An enlarged picture of air holes. (c) A cross sectional image of the air holes. The thickness of the membrane is about . The sidewall of the holes is tilted by 3°.
(Color online) (a) PL spectrum of a L7 cavity is shown in the black line, with the wavelength noted at the bottom. Simulated data are shown in colored lines, with the wavelength noted at the top. Curves with different colors correspond to different symmetric boundary conditions used in the simulation. Mode profiles of and for four modes, e1, e2, e3, and o1 are shown at the top. (b) Mode profiles of and components of e1 and o1. Coordinate systems are defined in the bottom figure.
(Color online) [(a) and (b)] For two different devices, PL spectra with (without) a linear polarizer are shown as colored (black) curves. The orientations of the polarizer are vertical and horizontal for red and blue curves, respectively. (c) A histogram of mode intensity (for mode e1) to background ratio, with an polarizer, of 15 devices.
Simulated and experimental quality factors for four lowest-energy modes. ’s were averaged from 15 devices.
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