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Initial phases in sputter deposited nanolaminate films
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Image of FIG. 1.
FIG. 1.

XRD patterns of the films A, B, and C on fused silica substrates and an uncoated substrate . Dashed arrow indicates the peak centroid.

Image of FIG. 2.
FIG. 2.

(a) Low magnification cross-sectional transmission electron micrograph of film A showing 20 layers (dark) and 19 layers (light). The arrow indicates growth direction. (b) Selected area diffraction pattern of (a) showing nanocrystallinity.

Image of FIG. 3.
FIG. 3.

(a) High magnification cross-sectional image of nanocrystallites embedded between two amorphous layers in film A. (b) Diffractograms of boxed image areas A and B. Spot assignment is given in Table II.

Image of FIG. 4.
FIG. 4.

Schematic drawing of the relationship between a polysynthetic twin with an composition plane and the space group unit cell from which it is derived. (a) The unit cell divided into two sections along the axis by the plane. (b) Formation of a polysynthetic twin from sections I and II. The composition plane and the and axes are invariant. (c) Projection along the (020) plane of the lattice and the twin showing angular relationships involved in the transformation.


Generic image for table
Table I.

Architecture of nanolaminates.

Generic image for table
Table II.

Indexing of diffractograms from film A shown in Fig. 3.


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Scitation: Initial phases in sputter deposited HfO2–Al2O3 nanolaminate films