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Schematic of the Chi-Kung plasma source (31 cm by 13.7 cm) and grounded chamber (31.8 cm by 29.4 cm) showing probes.
Plasma density vs solenoid current measured at with the LP (open triangles) and the CP (solid triangles) and at with the LP (open circles); the operating conditions are an argon pressure of and a rf power of .
(Color online) Normalized IEDF (color bar) vs solenoid current measured with the RFEA positioned at and plasma potential vs solenoid current obtained with the CP positioned at from the first derivative (filled red circles) and from the zero crossing in the second derivative (red crosses); same operating conditions as in Fig. 2 except for a higher rf power of for the RFEA measurements. The change from only induces an increase of the signal on the RFEA collector.
Plasma density profiles on axis obtained with the LP for (open squares), (crosses), and (open circles) for a rf power of ; optical emission signal of the argon I line measured with the periscope for (filled triangles) for a rf power of and normalized for a rf power of ; magnetic field profile (solid line) measured with the Hall probe for ; the operating pressure is .
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