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Structural investigation of nitrided -sapphire substrate by grazing incidence x-ray diffraction and transmission electron microscopy
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10.1063/1.2815919
/content/aip/journal/apl/91/20/10.1063/1.2815919
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/20/10.1063/1.2815919

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Glancing incident x-ray diffraction results for the nitrided sapphire. (a) Alignment for sapphire {11-20} and (b) for sapphire {30-30}.

Image of FIG. 2.
FIG. 2.

(Color online) Cross-sectional HRTEM image on the nitrided sapphire. (a) A HRTEM image, and (b) a schematic diagram for the zinc-blende AlN projected on {110} plane.

Image of FIG. 3.
FIG. 3.

(Color online) Schematic diagram of N atomic layer of the nonrotated {0002} and 30° rotated zb-AlN {111} planes overlapped on the O atomic layer of sapphire {0006} plane.

Tables

Generic image for table
Table I.

Calculation of spacing and the difference ratio. The difference ratio means that the difference between the measured and reference spacings for each AlN plane is divided by the reference spacing.a,b

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/content/aip/journal/apl/91/20/10.1063/1.2815919
2007-11-16
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural investigation of nitrided c-sapphire substrate by grazing incidence x-ray diffraction and transmission electron microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/20/10.1063/1.2815919
10.1063/1.2815919
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