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Templated fabrication of large area subwavelength antireflection gratings on silicon
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10.1063/1.2821833
/content/aip/journal/apl/91/23/10.1063/1.2821833
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/23/10.1063/1.2821833
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic illustration of the templating procedures for fabricating subwavelength-structured antireflection pyramid gratings on single-crystalline silicon.

Image of FIG. 2.
FIG. 2.

Replicated inverted pyramid arrays in silicon. (a) The size pyramids etched at for . (b) The size pyramids etched at for . The diameter silica spheres are used as templates.

Image of FIG. 3.
FIG. 3.

(Color online) Experimental (solid) and RCWA-modeled (dotted) specular optical reflectivity at normal incidence. Black: bare (100) silicon wafer. Red: size pyramids templated from silica spheres.

Image of FIG. 4.
FIG. 4.

(Color online) Comparison of the change of calculated effective refractive index at from the wafer surface to the vertex plane of inverted pyramids between a pyramid array (red circles) and a pyramid array (blue circles). The diameter of templating silica spheres is .

Image of FIG. 5.
FIG. 5.

RCWA-simulated normal-incidence optical reflection at vs inverted pyramid size. The silica spheres are used as templates.

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/content/aip/journal/apl/91/23/10.1063/1.2821833
2007-12-05
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Templated fabrication of large area subwavelength antireflection gratings on silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/23/10.1063/1.2821833
10.1063/1.2821833
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