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(Color online) Schematic illustration of the templating procedures for fabricating subwavelength-structured antireflection pyramid gratings on single-crystalline silicon.
Replicated inverted pyramid arrays in silicon. (a) The size pyramids etched at for . (b) The size pyramids etched at for . The diameter silica spheres are used as templates.
(Color online) Experimental (solid) and RCWA-modeled (dotted) specular optical reflectivity at normal incidence. Black: bare (100) silicon wafer. Red: size pyramids templated from silica spheres.
(Color online) Comparison of the change of calculated effective refractive index at from the wafer surface to the vertex plane of inverted pyramids between a pyramid array (red circles) and a pyramid array (blue circles). The diameter of templating silica spheres is .
RCWA-simulated normal-incidence optical reflection at vs inverted pyramid size. The silica spheres are used as templates.
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