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Metal induced hydrogen effusion from amorphous silicon
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10.1063/1.2819086
/content/aip/journal/apl/91/24/10.1063/1.2819086
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/24/10.1063/1.2819086

Figures

Image of FIG. 1.
FIG. 1.

Hydrogen thermal desorption spectra for films with various metal layers. The spectrum of without a metal layer is also provided as a reference. The thicknesses of each metal layer and the film were 5 and , respectively.

Image of FIG. 2.
FIG. 2.

Hydrogen concentration in films as a function of Al concentration in the film. films with a thick Al layer were annealed at 200 or for .

Image of FIG. 3.
FIG. 3.

Dependence of hydrogen thermal desorption from film/Al layer on the Al layer thickness. The Al layer thickness was varied from , and the thickness of the film was fixed at . The spectral profile of the reference is different from that in Fig. 1, because the films were prepared under different conditions.

Tables

Generic image for table
Table I.

Activation energy for effusion from with various metal layers.

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/content/aip/journal/apl/91/24/10.1063/1.2819086
2007-12-10
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Metal induced hydrogen effusion from amorphous silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/24/10.1063/1.2819086
10.1063/1.2819086
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