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Hydrogen thermal desorption spectra for films with various metal layers. The spectrum of without a metal layer is also provided as a reference. The thicknesses of each metal layer and the film were 5 and , respectively.
Hydrogen concentration in films as a function of Al concentration in the film. films with a thick Al layer were annealed at 200 or for .
Dependence of hydrogen thermal desorption from film/Al layer on the Al layer thickness. The Al layer thickness was varied from , and the thickness of the film was fixed at . The spectral profile of the reference is different from that in Fig. 1, because the films were prepared under different conditions.
Activation energy for effusion from with various metal layers.
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