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Investigation of stress-induced (100) platelet formation and surface exfoliation in plasma hydrogenated Si
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10.1063/1.2822414
/content/aip/journal/apl/91/24/10.1063/1.2822414
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/24/10.1063/1.2822414
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM micrographs from after plasma hydrogenation for various durations: (a) 0.5, (b) 1.0, (c) 1.5, (d) .

Image of FIG. 2.
FIG. 2.

(a) ERD spectra of hydrogenated with different durations. (b) The total amount of trapping hydrogen as a function of hydrogenation time.

Image of FIG. 3.
FIG. 3.

MIR-IR spectra from hydrogenated with different hydrogenation durations: (a) 1800–2300 and (b) .

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/content/aip/journal/apl/91/24/10.1063/1.2822414
2007-12-10
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of stress-induced (100) platelet formation and surface exfoliation in plasma hydrogenated Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/24/10.1063/1.2822414
10.1063/1.2822414
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