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Grazing incidence x-ray asymmetry diffraction patterns for C doped SiC films deposited at different substrate temperatures.
Hardness vs deposition temperature curve for C doped SiC films.
Raman spectra for C doped SiC films, and peaks are obtained according to the Gaussian function. The inset is vs deposition temperature curve.
The binding energy (BE) of C–C bonds vs deposition temperature.
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