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Surface hardness enhancement in -bonded carbon doped SiC nanocomposite films
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10.1063/1.2824811
/content/aip/journal/apl/91/24/10.1063/1.2824811
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/24/10.1063/1.2824811
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Grazing incidence x-ray asymmetry diffraction patterns for C doped SiC films deposited at different substrate temperatures.

Image of FIG. 2.
FIG. 2.

Hardness vs deposition temperature curve for C doped SiC films.

Image of FIG. 3.
FIG. 3.

Raman spectra for C doped SiC films, and peaks are obtained according to the Gaussian function. The inset is vs deposition temperature curve.

Image of FIG. 4.
FIG. 4.

The binding energy (BE) of C–C bonds vs deposition temperature.

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/content/aip/journal/apl/91/24/10.1063/1.2824811
2007-12-14
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface hardness enhancement in sp3-bonded carbon doped SiC nanocomposite films
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/24/10.1063/1.2824811
10.1063/1.2824811
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