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Effect of optical lithography patterning on the crystalline structure of tunnel junctions
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10.1063/1.2824858
/content/aip/journal/apl/91/24/10.1063/1.2824858
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/24/10.1063/1.2824858
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

XRD microbeam data recorded on a junction, identifying the different structures/layers. The inset shows schematically the diffraction geometry.

Image of FIG. 2.
FIG. 2.

(Color online) Color intensity maps (left) and the three-dimensional corresponding representation (right) of a junction. All the intensities were normalized. From top to bottom, positions corresponding to Co(0002), , and Pt(222) interplane spacing were imaged (Bragg angles of 25.57°, 33.52°, and 51.33°, respectively). The black line square contour (left column) represents the exact size of the junction. The smearing along one direction in the maps comes from a smeared footprint of the beam (due to the incident angle ) in this direction only. The dotted line shows the scanning direction (Fig. 3).

Image of FIG. 3.
FIG. 3.

(Color online) The values for square junctions of sizes of 50 (●), 20 (◼), and are reported. (Bottom) Measured integrated intensity of the Co peak function of the lateral position of the x-ray spot on the junction is shown by the symbols. The continuous line is the calculated convolution of a square junction with the beam footprint. In the case of the junction, only half of it was measured (●); the symmetric data are shown by the open symbols (○). (Top) Angular shift of peak’s c.m., across the junction. (Inset) Cartoon of the tilt of the crystalline planes in the junction. The values of the shift angle for Pt, , and Co layers are reported.

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/content/aip/journal/apl/91/24/10.1063/1.2824858
2007-12-14
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of optical lithography patterning on the crystalline structure of tunnel junctions
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/24/10.1063/1.2824858
10.1063/1.2824858
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