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Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing
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10.1063/1.2824390
/content/aip/journal/apl/91/26/10.1063/1.2824390
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/26/10.1063/1.2824390
/content/aip/journal/apl/91/26/10.1063/1.2824390
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/content/aip/journal/apl/91/26/10.1063/1.2824390
2007-12-26
2014-08-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/26/10.1063/1.2824390
10.1063/1.2824390
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