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Self-assembly of silicide quantum dot arrays on stepped silicon surfaces by reactive epitaxy
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10.1063/1.2828036
/content/aip/journal/apl/91/26/10.1063/1.2828036
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/26/10.1063/1.2828036
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Growth of 0.2 ML of Co on vicinal Si(111) surface. (a) Empty-state STM topography image ( is ) that discloses triangular islands and Co RCs on the step terraces. There are clean patches that appear at a different level. The inset reveals the flattop of the islands that exhibit a surface reconstruction. (b) Schematic description of the early growth stage of Co that show the nucleation position of the islands and Co RCs which starts to nucleate at the upper side of the step, on the half unit cell of the . Co RCs would nucleate around the islands, saturating the terrace in the proximity of the step edge. The uncoved parts of the surface maintain the surface reconstruction up to the lower step edge.

Image of FIG. 2.
FIG. 2.

(Color online) Growth of 0.4 ML of Co on vicinal Si(111) at rate. (a) Empty-state STM topography image ( is ) that exhibits a dense array of nanodots over an extended area of the sample. (b) Detailed image of a single island with a hexagonlike geometry with its edges limited by several HUCs of the . The flattop and surface reconstruction are visible. (c) Island perimeter distribution that follows a Gaussian function with a maximum centerd in and a deviation of around .

Image of FIG. 3.
FIG. 3.

(Color online) Empty-state STM topography image ( is ) corresponding to the growth of 1 ML of Co on the vicinal Si(111) surface at deposition rate.

Image of FIG. 4.
FIG. 4.

(Color online) Cobalt silicide surface structures found on flat Si(111) after 0.4 ML deposition of Co. (a) Empty-state STM topography image ( is ) showing complex surface structures with a low density of clusters (bright features). Islands with other geometries and Co concentration coexist. (b) Enlarged STM current image ( is ) from (a). Higher islands show surface reconstructions, and appear together with other silicide species, namely, with lower height, reconstructed islands, Co RCs, and patches.

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/content/aip/journal/apl/91/26/10.1063/1.2828036
2007-12-27
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Self-assembly of silicide quantum dot arrays on stepped silicon surfaces by reactive epitaxy
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/26/10.1063/1.2828036
10.1063/1.2828036
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