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Microvalve architecture. The microchannel cover consists of a silicon pad processed on a flexible PDMS membrane. The vertical movement of the silicon pad provides actuation through the pinching of the silicon microchannel.
Notations and dimensions of the studied structure.
Measured static deformations (a) and (b) as a function of the inlet pressure . and are approximated using polynomial functions.
Calculated actuation frequencies. Presence of a self-oscillation range depending on the inlet pressure.
Hot-wire setup for the measurement of the actuation frequency (a). Measured actuation frequency as a function of the inlet pressure, agreement with the theoretical results.
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