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Self-oscillation mode due to fluid-structure interaction in a micromechanical valve
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10.1063/1.2752530
/content/aip/journal/apl/91/3/10.1063/1.2752530
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/3/10.1063/1.2752530
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Microvalve architecture. The microchannel cover consists of a silicon pad processed on a flexible PDMS membrane. The vertical movement of the silicon pad provides actuation through the pinching of the silicon microchannel.

Image of FIG. 2.
FIG. 2.

Notations and dimensions of the studied structure.

Image of FIG. 3.
FIG. 3.

Measured static deformations (a) and (b) as a function of the inlet pressure . and are approximated using polynomial functions.

Image of FIG. 4.
FIG. 4.

Calculated actuation frequencies. Presence of a self-oscillation range depending on the inlet pressure.

Image of FIG. 5.
FIG. 5.

Hot-wire setup for the measurement of the actuation frequency (a). Measured actuation frequency as a function of the inlet pressure, agreement with the theoretical results.

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/content/aip/journal/apl/91/3/10.1063/1.2752530
2007-07-17
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Self-oscillation mode due to fluid-structure interaction in a micromechanical valve
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/3/10.1063/1.2752530
10.1063/1.2752530
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